ADVANCED MICROMACHINES FOR INDUSTRY
Microsystems comprising micromachined devices, microelectronic systems, microstructures and microelectronic systems, namely sensors, actuators, transducer, telemetry units, pressure sensors, control circuitry, spray atomizers, and polymeric, ceramic, such metallic, plastic and glass packaging for sensors, actuators, transducers, telemetry units, application specific integrated circuit (ASICs) and control circuitry
Abandoned · November 29, 1999 · 75859034 ·