| Serial Number | 99244546 |
| Word Mark | EUV WAFER |
| Filing Date | Friday, June 20, 2025 |
| Status | 641 - NON-FINAL ACTION - MAILED |
| Status Date | Thursday, February 12, 2026 |
| Registration Number | 0000000 |
| Registration Date | NOT AVAILABLE |
| Mark Drawing | 4 - Illustration: Drawing with word(s) / letter(s) / number(s) in Block form |
| Published for Opposition Date | NOT AVAILABLE |
| Pseudo Mark | EXTREME ULTRAVIOLET LITHOGRAPHY; EXTREME ULTRA VIOLET LITHOGRAPHY |
| Goods and Services | Apparatus and instruments for physics, namely, extreme ultraviolet (EUV) radiation-measurement wafers equipped with embedded EUV sensitive electronic sensors for monitoring wafer level EUV exposure and environmental conditions inside EUV semiconductor processing systems; Diagnostic equipment for research laboratory use, namely, EUV sensing wafers for measuring EUV radiation levels and chamber environmental characteristics during semiconductor wafer processing; Measures for measuring EUV radiation distribution and environmental characteristics within semiconductor process chambers; Computer software, recorded, for collecting, analyzing, and displaying EUV radiation and environmental characteristic data obtained during semiconductor processing; Computer software applications, downloadable, for collecting, analyzing, and displaying EUV radiation and environmental characteristic data obtained during semiconductor processing |
| International Class | 009 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments; apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling electricity; apparatus for recording, transmission or reproduction of sound or images; magnetic data carriers, recording discs; automatic vending machines and mechanisms for coin operated apparatus; cash registers, calculating machines, data processing equipment and computers; fire extinguishing apparatus. |
| US Class Codes | 021, 023, 026, 036, 038 |
| Class Status Code | 6 - Active |
| Class Status Date | Friday, June 20, 2025 |
| Primary Code | 009 |
| First Use Anywhere Date | Thursday, November 30, 2023 |
| First Use In Commerce Date | Thursday, November 30, 2023 |
| Party Name | KLA Corporation |
| Party Type | 10 - Original Applicant |
| Legal Entity Type | 03 - Corporation |
| Address | Milpitas, CA 95035 |
| Event Date | Event Description |
| Friday, June 20, 2025 | NEW APPLICATION ENTERED |
| Friday, June 20, 2025 | APPLICATION FILING RECEIPT MAILED |
| Tuesday, October 28, 2025 | NEW APPLICATION OFFICE SUPPLIED DATA ENTERED |
| Friday, November 7, 2025 | ASSIGNED TO EXAMINER |
| Tuesday, November 18, 2025 | NON-FINAL ACTION WRITTEN |
| Tuesday, November 18, 2025 | NON-FINAL ACTION E-MAILED |
| Tuesday, November 18, 2025 | NOTIFICATION OF NON-FINAL ACTION E-MAILED |
| Monday, January 26, 2026 | TEAS RESPONSE TO OFFICE ACTION RECEIVED |
| Monday, January 26, 2026 | CORRESPONDENCE RECEIVED IN LAW OFFICE |
| Monday, January 26, 2026 | TEAS/EMAIL CORRESPONDENCE ENTERED |
| Thursday, February 12, 2026 | NON-FINAL ACTION WRITTEN |
| Thursday, February 12, 2026 | NON-FINAL ACTION E-MAILED |
| Thursday, February 12, 2026 | NOTIFICATION OF NON-FINAL ACTION E-MAILED |